國立虎尾科技大學-光電工程系-奈米元件製程與量測研究室

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	研究主題(Research Topics)

		(1) Solar cells research：開發矽基太陽能電池(Solar cells)用新材料、新製程或新結構。新結構包括： (a)載子選擇性接觸式太陽能電池[Carriers Selective Contact (CSC) Solar Cells] (b)射極及背部鈍化式太陽能電池[Passivated Emitter and Rear Cells (PERC)] (c)射極鈍化及背部局部擴散式太陽能電池[Passivated Emitter, Rear Locally Diffused (PERL) Cells] (d)射極鈍化及背部全部擴散式太陽能電池[Passivated Emitter, Rear Totally Diffused (PERT) Cells] (e)分指狀背接觸式太陽能電池[Interdigitated Back Contact (IBC) Solar Cells] (f)射極穿孔式太陽能電池[Emitter Wrap Through (EWT) Solar Cells] (g)埋入接觸式太陽能電池[Buried Contact (BC) Solar Cells] (2) Study of carbon nanotube (CNT) synthesized by alcohol catalytic chemical-vapor-deposition (ACCVD) 利用酒精催化化學氣相沉積法(ACCVD)成長奈米碳管(CNT)，並應用於微電子元件。 (3) Silicon nanowire research：開發矽奈米線(Silicon nanowire)，並應用於微電子元件。 (4) Nanocrystal as trapping layer for nonvolatile flash memory applications: 開發新穎奈米晶體(<10 nm)當非揮發性記憶體元件的電荷補捉層材料。 (5) Metal gate/High-k material for metal-oxide-semiconductor (MOS) device applications 開發或改善一新穎電極/高介電係數閘介電層材料(metal gates:Hf_xTa_yN, Ti_xTa_yN, ………, High-k dielectrics:HfO_xN_y, La₂O₃, HfSiON, HfTaON, HfTaSiON,..)

研究主題(Research Topics)